Zanephotonichade da'awa
Phototonic hade da'irori(Pic) galibi ana tsara su tare da taimakon rubutun lissafi saboda mahimmancin tsayin daka a cikin masu wucewa ko wasu aikace-aikacen da suke kula da tsawon hanyar.HotoAn kera ta hanyar bin dowers da yawa (yawanci 10 zuwa 30) akan wafer, wanda ya ƙunshi siffofi da yawa na polygonal, galibi ana wakilta a cikin tsarin GDSGONAL. Kafin aika fayil ɗin zuwa mai ƙera Photomask, yana da ƙarfi sosai don iya canza hoton don tabbatar da daidaiton ƙirar. An rarraba shi zuwa matakan da yawa: matakin mafi ƙasƙanci shine zaɓin lantarki mai tsayi guda uku, kodayake ana gudanar da ma'amala tsakanin zarra a cikin kayan macroscopic. Hanyoyin hankula sun hada da ingantacciyar lokaci-yanki na yanki-bambanci (3D FDTD) da EgenMode fadada (Eme). Wadannan hanyoyin sune cikakken inganci, amma basu da amfani ga duk lokacin daukar hoto. Mataki na gaba shine 2.5-girma aya, kamar ingancin-bambanci-bambanci mai yaduwa (FD-BPM). Wadannan hanyoyin suna da sauri sosai, amma haddasa wasu daidaito kuma zasu iya magance yaduwar passexaily kuma ba za a iya amfani da su ne kawai za a iya amfani da su ba su kwatanta masumaitawa, misali. Mataki na gaba shine 2D aya simintin, kamar 2D FDTD da 2D BPM. Waɗannan suna da sauri, amma suna da iyakataccen aiki, kamar su ba za su iya kwaikwayon abubuwan ƙwayoyin cuta ba. Matsayi na gaba ne watsawa da / ko watsa matrix siminti. Kowane babban bangaren an rage zuwa wani abu tare da shigar da shigarwar da aka haɗa zuwa can can can can can can can can can can can can can can can can can can can can can can can can can can can can can can can can can can can can can can can can can can can can can can can can can can can can can can can can can can can can can can can can can can can can can can can can can can can can can can can can can can can can can can can can can can can yake. Waɗannan surarwar suna da sauri. Ana samun siginar fitarwa ta hanyar ninka matrix na watsa labarai ta hanyar shigarwar shigarwar. Matrix na watsa matrix (wanda abubuwan da ake kira S-sigogi) suna ninka shigarwar da siginar fitarwa a gefe ɗaya na bangaren. Ainihin, matrix na watsa ya ƙunshi tunani a cikin kashi. Matrix na watsa matrix yawanci ya ninka kamar yadda matrix ɗin watsa abubuwa a cikin kowane girma. A takaice, daga 3D em zuwa watsawa / watsa matrix strulation, kowane Layer Zaɓi matakin kasuwanci don inganta tsarin ingancin ƙirar su don inganta tsarin ingancin ƙira.
Koyaya, dogaro da siminti na lantarki na wasu abubuwa da amfani da matrix / canja wurin matrix ɗin baya bada garantin cikakkiyar ƙira gaba ɗaya a gaban farantin kwarara. Misali, tsawon hanyar da aka misalta, mai yawa matattara wanda ke kasa kashe kyawawan hanyoyin, ko thango biyu waɗanda suke da kusanci da matsalolin da ba a tsammani yayin ɗaukar hoto ba. Sabili da haka, kodayake babban aikin kwaikwayo na zamani suna ba da damar ingancin tsarin zane, har yanzu yana buƙatar daidaito da kuma ilimin fasaha, don tabbatar da daidaito da kuma amincin takardar kwarara.
Wani dabarar da ake kira spars fdtd tana ba da damar 3D da 2D FDTD da za a yi kai tsaye akan ƙirar hoton don tabbatar da ƙira. Kodayake yana da wuya kowane kayan samfuri na zaɓi don daidaita hoto mai girma, da sparser fdtd yana da ikon canza babban yanki na gida. A cikin gargajiya na gargajiya na gargajiya, abin kwaikwaya yana farawa ta hanyar fara da bangarorin shida na filin lantarki a cikin takamaiman adadin. Kamar yadda lokaci ke ci gaba, sabon kayan aikin filin a cikin ƙara ana lasafta, da sauransu. Kowane mataki yana buƙatar lissafi mai yawa, saboda haka yana ɗaukar lokaci mai tsawo. A cikin spars fdtd, maimakon yin lissafin kowane mataki a kowane mataki na ana kiyaye shi da tabbacin babban girma kuma ana lissafta kawai don waɗancan abubuwan haɗin. A kowane lokaci mataki, maki kusa da aka ƙara abubuwan haɗin filin, yayin da aka haɗa abubuwan da ke ƙasa da wata ƙafdar wutar lantarki ana ragu. Ga wasu tsarin, wannan hadawa na iya zama umarni da yawa na girma da sauri fiye da na 3D FDTD. Koyaya, spars fdtds ba su yi kyau lokacin ma'amala da tsarin rarraba abubuwa ba saboda wannan filin rarraba abubuwa, wanda ya haifar da jerin abubuwa masu tsawo da kuma wahalar sarrafawa. Hoto na 1 yana nuna misali mai hoto na hoto na 3D FDTD mai kama da zuwa katako mai narkewa (pbs).
Hoto na 1: Sakamakon Simulation daga 3D spars fdtd. (A) babban mahangar ne na tsarin da ake amfani dashi, wanda shine ma'aurata shugabanci. (B) Nuna wani hoton allo na daukar hoto ta amfani da ambaton Quasi-kyama. Dandagrs biyu da ke sama suna nuna saman alama game da alamomin Quasi-te da Quasi-TM da ke ƙasa, da kuma dabbobin biyu da ke ƙasa suna nuna mahallin giciye. (C) yana nuna alamar sikelin na kwaikwayi ta amfani da tunanin Quasi-TM.
Lokaci: Jul-23-2024