Don tushen siliki optoelectronics, silicon photodetectors (Si photodetector)

Don tushen siliki optoelectronics, silicon photodetectors

Masu daukar hotocanza siginar haske zuwa siginonin lantarki, kuma yayin da adadin canja wurin bayanai ke ci gaba da haɓaka, manyan na'urorin daukar hoto da aka haɗa tare da dandamali na tushen optoelectronics na silicon sun zama maɓalli ga cibiyoyin bayanai na gaba da hanyoyin sadarwar sadarwa. Wannan labarin zai ba da bayyani na ci-gaba na masu gano hotuna masu sauri, tare da mai da hankali kan germanium na tushen silicon (Ge ko Si photodetector)silicon photodetectorsdon haɗakar da fasahar optoelectronics.

Germanium abu ne mai ban sha'awa don gano hasken infrared na kusa akan dandamalin silicon saboda ya dace da tsarin CMOS kuma yana da ƙarfi sosai a tsawon tsawon sadarwa. Mafi na kowa tsarin Ge/Si photodetector shine fil diode, wanda germanium na ciki ya kasance sandwiched tsakanin nau'in P-type da N-type.

Tsarin na'ura Hoto 1 yana nuna madaidaicin fil Ge koDa photodetectortsari:

Babban fasali sun haɗa da: germanium sha Layer girma a kan siliki substrate; Ana amfani da su don tattara p da n lambobin sadarwa na masu caji; Haɗin kai waveguide don ingantaccen ɗaukar haske.

Ci gaban Epitaxial: Haɓaka germanium mai inganci akan silicon yana da ƙalubale saboda rashin daidaituwa na 4.2% tsakanin kayan biyu. Ana amfani da tsarin girma mai matakai biyu: ƙananan zafin jiki (300-400 ° C) haɓakar girman Layer da babban zafin jiki (sama da 600 ° C) jigon germanium. Wannan hanya tana taimakawa wajen sarrafa ɓangarorin zaren da ke haifar da rashin daidaituwar lattice. Bayan-girma annealing a 800-900 ° C kara rage zaren dislocation yawa zuwa kusan 10^7 cm^-2. Halayen ayyuka: Mafi ci gaba na Ge/Si PIN photodetector zai iya cimma: amsawa,> 0.8A / W a 1550 nm; Bandwidth,> 60 GHz; Dark halin yanzu, <1 μA a -1 V son zuciya.

Haɗin kai tare da dandamali na tushen optoelectronics na silicon

Haɗin kai nahigh-gudun photodetectorstare da dandamali na tushen siliki na optoelectronics yana ba da damar ci gaba da transceivers na gani da haɗin kai. Babban hanyoyin haɗin kai guda biyu sune kamar haka: Haɗin kai na gaba (FEOL), inda ake kera na'urar daukar hoto da transistor a lokaci guda akan siliki mai ba da damar sarrafa zafin jiki, amma ɗaukar yanki. Haɗin kai na ƙarshen baya (BEOL). Ana kera na'urorin daukar hoto a saman karfen don guje wa tsangwama tare da CMOS, amma an iyakance su ga ƙananan yanayin aiki.

Hoto 2: Amsa da bandwidth na babban mai gano hoto na Ge / Si

Aikace-aikacen cibiyar bayanai

Na'urorin daukar hoto masu sauri su ne maɓalli mai mahimmanci a cikin ƙarni na gaba na haɗin gwiwar cibiyar bayanai. Babban aikace-aikacen sun haɗa da: masu ɗaukar hoto: 100G, 400G da ƙimar mafi girma, ta amfani da tsarin PAM-4; Ahigh bandwidth photodetector(> 50 GHz) ana buƙata.

Silicon tushen optoelectronic hadedde da'ira: monolithic hadewa na ganowa tare da modulator da sauran aka gyara; Ƙaƙƙarfan injin gani mai girma.

Gine-ginen da aka rarraba: haɗin kai na gani tsakanin lissafin rarraba, ajiya, da ajiya; Tuɓar buƙatun masu amfani da makamashi mai ƙarfi, masu gano hotuna masu girman bandwidth.

Hangen gaba

Makomar hadedde optoelectronic high-gudun photodetectors zai nuna wadannan halaye:

Ƙididdigar bayanai mafi girma: Tuki ci gaban 800G da 1.6T transceivers; Ana buƙatar masu gano hoto tare da bandwidth sama da 100 GHz.

Inganta haɓakawa: Haɗin guntu guda ɗaya na kayan III-V da silicon; Fasahar haɗin kai ta 3D ta ci gaba.

Sabbin kayan aiki: Binciko abubuwa masu girma biyu (kamar graphene) don gano hasken ultrafast; Wani sabon gami na rukunin IV don tsawaita ɗaukar nauyi.

Aikace-aikace masu tasowa: LiDAR da sauran aikace-aikacen ji suna haifar da ci gaban APD; Aikace-aikacen photon na Microwave suna buƙatar manyan masu gano hoto na layi.

Masu gano hotuna masu sauri, musamman Ge ko Si photodetectors, sun zama babban direba na tushen optoelectronics na silicon da hanyoyin sadarwa na gani na gaba. Ci gaba da ci gaba a cikin kayan, ƙirar na'ura, da fasahar haɗin kai suna da mahimmanci don biyan buƙatun buƙatun bandwidth na cibiyoyin bayanai na gaba da hanyoyin sadarwar sadarwa. Yayin da filin ke ci gaba da haɓakawa, za mu iya tsammanin ganin masu binciken hoto tare da bandwidth mafi girma, ƙananan ƙararrawa, da haɗin kai maras kyau tare da na'urorin lantarki da na hoto.